Oil Mist Filter for Semiconductor Vacuum Equipment
Review this oil mist filter around the listed KF25 interface, pump exhaust path, installation space and maintenance access before integrating it with semiconductor glove box vacuum equipment.
Oil mist filter
Interface: Standard KF25
Function: Absorb the oil mist discharged from the pump body to purify the gas
Purpose: Suitable for various small rotary vane oil vacuum pumps
